The 1200 nm‐Band InAs/GaAs Quantum Dot Intermixing by Dry Etching and Ion Implantation

physica status solidi (a)Yu Hiraishi; Tomohiro Shirai; Jinkwan Kwoen; Taisei Ito; Yuichi Matsushima; Hiroshi Ishikawa; Yasuhiko Arakawa; Katsuyuki Utaka

Published

Apr 2020

Reference

217(10), 1900851 (2020)